Auger electron spectroscopy mapping of lithium niobate ferroelectric domains with nano-scale resolution
نویسندگان
چکیده
The +/−Z ferroelectric domains in periodically poled lithium niobate are characterized with Auger electron spectroscopy. -Z have a higher O-KLL transition amplitude than the +Z domains. Based on this, spectroscopy mapping can be used peak to image +/-Z domain structure. This new characterization technique is confirmed HF etching, and compared SEM imaging. Spatial resolution down 68 nm demonstrated.
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2022
ISSN: ['2159-3930']
DOI: https://doi.org/10.1364/ome.474717